Li1.3Al0.3Ti1.7(PO4)3 thin films were prepared by rapid thermal annealing (RTA) and conventional furnace annealing (CFA). The phase and surface morphology of the prepared films were characterized by X-ray diffraction and scanning electron microscope. The electrochemical window, ionic condutivity and activation energy were conducted by cyclic voltammetry, and A.C. impedance spectroscopy. The results show that the films prepared by RTA and CFA are homogenous and crack-free. However, the film prepared by RTA shows smaller grains and is denser than the one prepared by CFA. The electrochemical windows of the two films are beyond 2.4V. The ionic conductivity of the films prepared by RTA and CFA are 2.7?10-6 S.cm-1 and 1.4?10-6 S.cm-1, respectively. The activation energy of the film prepared by RTA is slightly smaller than the one prepared by CFA.