Here a convenient method for preparation of low viscosity vinyl terminated fluorine and hydrogen polysiloxanes was explored. Ring-opening copolymerization of octmethylcyclotetrasiloxane (D4), 2,4,6,8-tetramethylcyclotetrasiloxane (D4H) and 1,3,5-tris(3,3,3-trifluoropropyl)methylcyclotrisiloxane (D3F) was firstly catalyzed with highly active strong acidic cation exchange resin (HND-580), and then end-capping was conducted with 1,1,3,3-Tetramethyl-1,3-divinyldisiloxane (D2Vi) to obtain low viscosity vinyl terminated fluorine and hydrogen polysiloxanes. The molecular structures of the copolymers were characterized by FT-IR and 1H-NMR spectroscopy. The thermal properties of the copolymers were measured by TGA. The influences of catalyst dosage, polymerization time, polymerization temperature and number of catalyst cycleson on the polymerization were studied. The results exhibited that when catalyst dosage was 5 wt% of the amount of reactant, polymerization temperature was 60℃ and its time was 6 h, the yield of the product obtained was 88.69% and the viscosity was 31 mPa?s. The contact Angle of the silicone oil can reach 115.2?.